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描述
無描述配置
CD Performance: -Static accuracy: 3σ (%) < 1.1% -Dynamic accuracy: 1.2nm (3σ) -Throughput (9 sites): 14 wph -Minimum pattern spacing (dense configuration): 40nm Depth Performance: -Static accuracy 3σ (%) < 0.4% -Dynamic accuracy: 0.5nm (3σ) -Minimum pattern spacing (dense configuration): 30nm 3D Imaging: Max scan size 49X49µm Noise 0.1nm RMSOEM 代工型號說明
未提供文檔
無文檔
類別
AFM
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
118263
晶圓尺寸:
12"/300mm
年份:
2009
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
BRUKER
INSIGHT 3DAFM
類別
AFM
上次驗證: 超過60天前
關鍵商品詳情
條件:
Used
作業狀態:
未知
產品編號:
118263
晶圓尺寸:
12"/300mm
年份:
2009
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
描述
無描述配置
CD Performance: -Static accuracy: 3σ (%) < 1.1% -Dynamic accuracy: 1.2nm (3σ) -Throughput (9 sites): 14 wph -Minimum pattern spacing (dense configuration): 40nm Depth Performance: -Static accuracy 3σ (%) < 0.4% -Dynamic accuracy: 0.5nm (3σ) -Minimum pattern spacing (dense configuration): 30nm 3D Imaging: Max scan size 49X49µm Noise 0.1nm RMSOEM 代工型號說明
未提供文檔
無文檔