Micrascan VII is a 157 nm technology is an extension of optical lithography that offers smaller feature sizes (or line-widths) for smarter, more sophisticated chips. Today's optical lithography standard is 193 nm technology that, with its leading-edge resolution of 80 nanometers, can print approximately 3,000 features that can be stacked up against the side of a salt crystal. 157 nm lithography is targeted for use below 65 nm.

SVG acquiring the old Perkin Elmer Micrascan operation in the late 1980s. Silicon Valley Group, Inc. stockholders approve merger with ASM Lithography Holding NV.

SVG is a leading supplier of wafer processing equipment for the worldwide semiconductor industry. The company designs, manufactures and markets technically sophisticated equipment used in the primary stages of semiconductor manufacturing. Its products include: photoresist processing equipment; oxidation, diffusion and low-pressure chemical vapor deposition processing systems; atmospheric pressure chemical vapor deposition systems; lithography exposure tools that use step-and-scan technology; and precision optical components and systems.



MICRASCAN VII

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